XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

N. Tabet; M. Faiz; A. Al-Oteibi

doi:10.1016/j.elspec.2007.11.003

XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

N. Tabet^*
, M. Faiz
, A. Al-Oteibi

^*Corresponding author for this work

King Fahd University of Petroleum & Minerals

Research output: Contribution to journal › Article › peer-review

102 Scopus citations

Abstract

We have synthesized pure and N-doped ZnO films by reactive plasma in a DC-Magnetron sputtering system. Nitrogen was implanted by using an ion gun attached to an electron spectrometer. The films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and scanning electron microscopy (SEM) to investigate their composition and microstructure. XPS revealed the presence of two well-resolved peaks in N 1s spectra at about 396.2 and 404.3 eV. The peak at 404.3 eV has been assigned to zinc nitrite while the peak at 396.2 eV to zinc nitride. After annealing the sample at 250 °C in air for 1 h, one single peak, located at 399.1 eV, was observed. We suggest that this is due to the decomposition of nitrite and the formation of oxynitride.

Original language	English
Pages (from-to)	15-18
Number of pages	4
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	163
Issue number	1-3
DOIs	https://doi.org/10.1016/j.elspec.2007.11.003
State	Published - Apr 2008

Bibliographical note

Funding Information:
This work was funded by King Fahd University of Petroleum and Minerals under contract FT/2002-03. The authors thank KFUPM for its support. SEM and XRD work was carried out in the Mechanical Engineering Department.

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

DC sputtering
Nitrogen doping
XPS
ZnO thin films

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

Access to Document

10.1016/j.elspec.2007.11.003

Cite this

@article{148ded33feee4879aace885a4ab076a0,

title = "XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma",

abstract = "We have synthesized pure and N-doped ZnO films by reactive plasma in a DC-Magnetron sputtering system. Nitrogen was implanted by using an ion gun attached to an electron spectrometer. The films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and scanning electron microscopy (SEM) to investigate their composition and microstructure. XPS revealed the presence of two well-resolved peaks in N 1s spectra at about 396.2 and 404.3 eV. The peak at 404.3 eV has been assigned to zinc nitrite while the peak at 396.2 eV to zinc nitride. After annealing the sample at 250 °C in air for 1 h, one single peak, located at 399.1 eV, was observed. We suggest that this is due to the decomposition of nitrite and the formation of oxynitride.",

keywords = "DC sputtering, Nitrogen doping, XPS, ZnO thin films",

author = "N. Tabet and M. Faiz and A. Al-Oteibi",

note = "Funding Information: This work was funded by King Fahd University of Petroleum and Minerals under contract FT/2002-03. The authors thank KFUPM for its support. SEM and XRD work was carried out in the Mechanical Engineering Department.",

year = "2008",

month = apr,

doi = "10.1016/j.elspec.2007.11.003",

language = "English",

volume = "163",

pages = "15--18",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier B.V.",

number = "1-3",

}

TY - JOUR

T1 - XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

AU - Tabet, N.

AU - Faiz, M.

AU - Al-Oteibi, A.

N1 - Funding Information: This work was funded by King Fahd University of Petroleum and Minerals under contract FT/2002-03. The authors thank KFUPM for its support. SEM and XRD work was carried out in the Mechanical Engineering Department.

PY - 2008/4

Y1 - 2008/4

N2 - We have synthesized pure and N-doped ZnO films by reactive plasma in a DC-Magnetron sputtering system. Nitrogen was implanted by using an ion gun attached to an electron spectrometer. The films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and scanning electron microscopy (SEM) to investigate their composition and microstructure. XPS revealed the presence of two well-resolved peaks in N 1s spectra at about 396.2 and 404.3 eV. The peak at 404.3 eV has been assigned to zinc nitrite while the peak at 396.2 eV to zinc nitride. After annealing the sample at 250 °C in air for 1 h, one single peak, located at 399.1 eV, was observed. We suggest that this is due to the decomposition of nitrite and the formation of oxynitride.

AB - We have synthesized pure and N-doped ZnO films by reactive plasma in a DC-Magnetron sputtering system. Nitrogen was implanted by using an ion gun attached to an electron spectrometer. The films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and scanning electron microscopy (SEM) to investigate their composition and microstructure. XPS revealed the presence of two well-resolved peaks in N 1s spectra at about 396.2 and 404.3 eV. The peak at 404.3 eV has been assigned to zinc nitrite while the peak at 396.2 eV to zinc nitride. After annealing the sample at 250 °C in air for 1 h, one single peak, located at 399.1 eV, was observed. We suggest that this is due to the decomposition of nitrite and the formation of oxynitride.

KW - DC sputtering

KW - Nitrogen doping

KW - XPS

KW - ZnO thin films

UR - https://www.scopus.com/pages/publications/43849109011

U2 - 10.1016/j.elspec.2007.11.003

DO - 10.1016/j.elspec.2007.11.003

M3 - Article

AN - SCOPUS:43849109011

SN - 0368-2048

VL - 163

SP - 15

EP - 18

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

IS - 1-3

ER -

XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

Abstract

Bibliographical note

UN SDGs

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this