Vibration analysis of an elastically restrained microcantilever beam under electrostatic loading using wavelet-based finite element method

Salem Bashmal, Wasiu Adeyemi Oke, Yehia Khulief

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

An electro-mechanical analysis of a microcantilever beam considering the effect of size dependence and flexible supports is presented. Both static and dynamic analyses are performed to show the coupled effect of flexible support and electrical voltage on the static and dynamic performance of the microcantilever beam. The wavelet-based finite element method (FEM) is used to derive the elastodynamic model of the microcantilever beam. The energy expressions are derived using couple stress theory, while additional energy terms are introduced to represent the flexible boundaries and fringing fields. Numerical simulations and comparisons with experimental data show the validity of the developed waveletbased finite element model and its potential in tackling practical problems in the design and evaluation of micro-devices.

Original languageEnglish
Pages (from-to)147-152
Number of pages6
JournalMicro and Nano Letters
Volume10
Issue number3
DOIs
StatePublished - 1 Mar 2015

Bibliographical note

Publisher Copyright:
© The Institution of Engineering and Technology 2015.

ASJC Scopus subject areas

  • Bioengineering
  • Biomedical Engineering
  • General Materials Science
  • Condensed Matter Physics

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