Abstract
An electro-mechanical analysis of a microcantilever beam considering the effect of size dependence and flexible supports is presented. Both static and dynamic analyses are performed to show the coupled effect of flexible support and electrical voltage on the static and dynamic performance of the microcantilever beam. The wavelet-based finite element method (FEM) is used to derive the elastodynamic model of the microcantilever beam. The energy expressions are derived using couple stress theory, while additional energy terms are introduced to represent the flexible boundaries and fringing fields. Numerical simulations and comparisons with experimental data show the validity of the developed waveletbased finite element model and its potential in tackling practical problems in the design and evaluation of micro-devices.
Original language | English |
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Pages (from-to) | 147-152 |
Number of pages | 6 |
Journal | Micro and Nano Letters |
Volume | 10 |
Issue number | 3 |
DOIs | |
State | Published - 1 Mar 2015 |
Bibliographical note
Publisher Copyright:© The Institution of Engineering and Technology 2015.
ASJC Scopus subject areas
- Bioengineering
- Biomedical Engineering
- General Materials Science
- Condensed Matter Physics