Ultra-high frequency, high Q/volume micromechanical resonators in a planar AlN phononic crystal
- M. Ghasemi Baboly
- , S. Alaie
- , C. M. Reinke
- , I. El-Kady
- , Z. C. Leseman*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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