Abstract
High sensitivity of Gravity Inertial Sensors (GIS) can be achieved with low natural frequency Ω of the proof mass (PM) that must have low level noises in the read-out system and a minimized torsion stiffness. In this article, a differential electrostatic system (DES) is proposed where both previous two conditions are met. We also consider the effect of the asymmetry γ of the DES in the GIS that is limited by the manufacturing technology of the sensor and hence making it difficult to reduce further. We propose an alternative compensation of this asymmetry by introducing additional sources of electric field. It is shown that any inaccuracy in this compensation will lead to inaccuracy of the sensor and can violates it stability. Based on open public literature, this is the first time where it is possible to ascertain the torsion stiffness reduction limits for such a sensor.
Original language | English |
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Pages (from-to) | 318-325 |
Number of pages | 8 |
Journal | Measurement: Journal of the International Measurement Confederation |
Volume | 116 |
DOIs | |
State | Published - Feb 2018 |
Bibliographical note
Publisher Copyright:© 2017 Elsevier Ltd
Keywords
- An electrostatic actuator
- Angular accelerometer
- Differential capacitive sensor
- Electrostatic stiffness
- Gravity gradiometer
- Linear accelerometer
- Resonant sensor
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering