Towards an evaluation of stiffness parameters of Micro-beams

Salem Bashmal*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Microfabricated devices are widely used as sensors, actuators and resonators. The performance of these devices is influenced by the process used for microfabrication and machining. Several models are available in the literature to predict the static and dynamic behavior of MEMS devices. While most of the reported models neglected the effect of flexible boundary conditions on the overall performance of the microdevices, some reported works showed that the characteristics of the micro-beams are significantly influenced by the unavoidable flexibility at the boundaries. Therefore, several recent studies considered the real support conditions by introducing spring elements at the boundary. The stiffness parameters were then estimated by fitting the numerical results with experimental measurements. There is some discrepancy between the stiffness values reported in different studies for the same microbeam. This work also presented a numerical finite element model to investigate the effect of the support on the equivalent stiffness parameters that represent real boundary conditions.

Original languageEnglish
Title of host publicationICSV 2016 - 23rd International Congress on Sound and Vibration
Subtitle of host publicationFrom Ancient to Modern Acoustics
PublisherInternational Institute of Acoustics and Vibrations
ISBN (Electronic)9789609922623
StatePublished - 2016
Event23rd International Congress on Sound and Vibration, ICSV 2016 - Athens, Greece
Duration: 10 Jul 201614 Jul 2016

Publication series

NameICSV 2016 - 23rd International Congress on Sound and Vibration: From Ancient to Modern Acoustics


Conference23rd International Congress on Sound and Vibration, ICSV 2016

Bibliographical note

Funding Information:
The author acknowledges the support provided by King Fahd University of Petroleum and Minerals, Dhahran, Saudi Arabia.

ASJC Scopus subject areas

  • Mechanical Engineering
  • Safety, Risk, Reliability and Quality
  • Acoustics and Ultrasonics


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