Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

Arpys Arevalo; D. Conchouso; D. Castro; N. Jaber; M. I. Younis; I. G. Foulds

doi:10.1109/NEMS.2015.7147429

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

Arpys Arevalo
, D. Conchouso
, D. Castro
, N. Jaber
, M. I. Younis
, I. G. Foulds

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane.

Original language	English
Title of host publication	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	290-295
Number of pages	6
ISBN (Electronic)	9781467366953
DOIs	https://doi.org/10.1109/NEMS.2015.7147429
State	Published - 1 Jul 2015
Externally published	Yes

Publication series

Name	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Access to Document

10.1109/NEMS.2015.7147429

Cite this

Arevalo, A., Conchouso, D., Castro, D., Jaber, N., Younis, M. I., & Foulds, I. G. (2015). Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 (pp. 290-295). Article 7147429 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2015.7147429

Arevalo, Arpys ; Conchouso, D. ; Castro, D. et al. / Towards a digital sound reconstruction MEMS device : Characterization of a single PZT based piezoelectric actuator. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 290-295 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

@inproceedings{82696edc95334a74a4dc4c4d8579a565,

title = "Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator",

abstract = "In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane.",

author = "Arpys Arevalo and D. Conchouso and D. Castro and N. Jaber and Younis, \{M. I.\} and Foulds, \{I. G.\}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.",

year = "2015",

month = jul,

day = "1",

doi = "10.1109/NEMS.2015.7147429",

language = "English",

series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "290--295",

booktitle = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

address = "United States",

}

Arevalo, A, Conchouso, D, Castro, D, Jaber, N, Younis, MI & Foulds, IG 2015, Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator. in 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015., 7147429, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 290-295. https://doi.org/10.1109/NEMS.2015.7147429

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator. / Arevalo, Arpys; Conchouso, D.; Castro, D. et al.
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 290-295 7147429 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Towards a digital sound reconstruction MEMS device

T2 - Characterization of a single PZT based piezoelectric actuator

AU - Arevalo, Arpys

AU - Conchouso, D.

AU - Castro, D.

AU - Jaber, N.

AU - Younis, M. I.

AU - Foulds, I. G.

PY - 2015/7/1

Y1 - 2015/7/1

N2 - In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane.

AB - In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane.

UR - https://www.scopus.com/pages/publications/84939534553

U2 - 10.1109/NEMS.2015.7147429

DO - 10.1109/NEMS.2015.7147429

M3 - Conference contribution

AN - SCOPUS:84939534553

T3 - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

SP - 290

EP - 295

BT - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Arevalo A, Conchouso D, Castro D, Jaber N, Younis MI, Foulds IG. Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 290-295. 7147429. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). doi: 10.1109/NEMS.2015.7147429

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

Abstract

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Bibliographical note

ASJC Scopus subject areas

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