@inproceedings{733c0dbe070f4e618c8a13a59c8de0b5,
title = "Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals",
abstract = "The thermal conductivity of single crystal silicon was engineered to be as low as 32.6W/mK using lithographically defined phononic crystals (PnCs), which is only one quarter of bulk silicon thermal conductivity [1]. Specifically sub-micron through-holes were periodically patterned in 500nm-thick silicon layers effectively enhancing both coherent and incoherent phonon scattering and resulting in as large as a 37\% reduction in thermal conductivity beyond the contributions of the thin-film and volume reduction effects. The demonstrated method uses conventional lithography-based technologies that are directly applicable to diverse micro/nano-scale devices, leading to potential performance improvements where heat management is important.",
author = "Bongsang Kim and Janet Nguyen and Clews, \{Peggy J.\} and Reinke, \{Charles M.\} and Drew Goettler and Leseman, \{Zayd C.\} and Ihab El-Kady and Olsson, \{Roy H.\}",
year = "2012",
doi = "10.1109/MEMSYS.2012.6170122",
language = "English",
isbn = "9781467303248",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "176--179",
booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",
}