The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings-a review

Zirconium-based coatings exhibit a range of useful properties such as high hardness, high temperature stability, biocompatibility, and good resistance to wear, erosion, corrosion and oxidation, making them suitable candidates for use in tribological, biomedical, corrosion-resistant, nuclear fuel, electrical and decorative applications. Common deposition methods reported for Zr-based coatings include cathodic vapor deposition, plasma enhanced chemical vapor deposition, magnetron sputtering, reactive sputtering, reactive melt infiltration, laser pulse deposition, etc. Both single and multilayered coatings are produced. This paper presents a review of the effects of deposition methods and operational conditions on the properties of zirconium carbide, zirconium nitride and zirconium carbonitride hard coatings. It describes the role of various process parameters used during the deposition of advanced functional coatings. The present study will contribute to the understanding of hard coatings in general.