Temperature effects on the performance of RuO2 thin-film pH sensor

A. Sardarinejad; D. K. Maurya; M. Khaled; K. Alameh

doi:10.1016/j.sna.2015.07.027

Temperature effects on the performance of RuO₂ thin-film pH sensor

A. Sardarinejad, D. K. Maurya^*, M. Khaled, K. Alameh

^*Corresponding author for this work

King Fahd University of Petroleum & Minerals

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

Abstract A miniaturized pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the temperature of the pH test solution on the performance of the sensor is investigated. Experimental results show that the pH sensor employing 300 nm thick RuO₂ sensing electrode exhibits Nernstian slopes of 65.66 mV/pH, 69.16 mV/pH, 72.50 mV/pH, 78.50 mV/pH and 84.50 mV/pH for pH test solution temperatures of 1.5 °C, 12 °C, 22 °C, 37 °C and 50 °C, respectively. The performance of the pH sensor in terms of sensitivity, response time, stability and reversibility is experimentally evaluated.

Original language	English
Article number	9259
Pages (from-to)	414-421
Number of pages	8
Journal	Sensors and Actuators A: Physical
Volume	233
DOIs	https://doi.org/10.1016/j.sna.2015.07.027
State	Published - 1 Sep 2015

Bibliographical note

Publisher Copyright:
© 2015 Elsevier B.V.

Keywords

Lab-on-a-chip
R.F. sputtering
Temperature effect
Thin film RuO electrodes
pH sensing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/j.sna.2015.07.027

Cite this

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title = "Temperature effects on the performance of RuO2 thin-film pH sensor",

abstract = "Abstract A miniaturized pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the temperature of the pH test solution on the performance of the sensor is investigated. Experimental results show that the pH sensor employing 300 nm thick RuO2 sensing electrode exhibits Nernstian slopes of 65.66 mV/pH, 69.16 mV/pH, 72.50 mV/pH, 78.50 mV/pH and 84.50 mV/pH for pH test solution temperatures of 1.5 °C, 12 °C, 22 °C, 37 °C and 50 °C, respectively. The performance of the pH sensor in terms of sensitivity, response time, stability and reversibility is experimentally evaluated.",

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AU - Sardarinejad, A.

AU - Maurya, D. K.

AU - Khaled, M.

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N2 - Abstract A miniaturized pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the temperature of the pH test solution on the performance of the sensor is investigated. Experimental results show that the pH sensor employing 300 nm thick RuO2 sensing electrode exhibits Nernstian slopes of 65.66 mV/pH, 69.16 mV/pH, 72.50 mV/pH, 78.50 mV/pH and 84.50 mV/pH for pH test solution temperatures of 1.5 °C, 12 °C, 22 °C, 37 °C and 50 °C, respectively. The performance of the pH sensor in terms of sensitivity, response time, stability and reversibility is experimentally evaluated.

AB - Abstract A miniaturized pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the temperature of the pH test solution on the performance of the sensor is investigated. Experimental results show that the pH sensor employing 300 nm thick RuO2 sensing electrode exhibits Nernstian slopes of 65.66 mV/pH, 69.16 mV/pH, 72.50 mV/pH, 78.50 mV/pH and 84.50 mV/pH for pH test solution temperatures of 1.5 °C, 12 °C, 22 °C, 37 °C and 50 °C, respectively. The performance of the pH sensor in terms of sensitivity, response time, stability and reversibility is experimentally evaluated.

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KW - R.F. sputtering

KW - Temperature effect

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