Surface composite and morphology tuning of tungsten oxide thin films for acetone gas sensing

Q. A. Drmosh*, N. A. Al-Muhaish, Yousif Ahmed Al Wajih, Mir Waqas Alam, Z. H. Yamani

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

In this work, different morphologies of tungsten oxide films were fabricated by DC sputtering, with subsequent post-annealing treatment at different temperatures for acetone detection. The effect of post-annealing treatment of tungsten oxide films on their composition, surface morphology, structure, and chemiresistive acetone gas sensing properties was thoroughly investigated. The sensing characteristics of the fabricated sensors are modified by the post-annealing treatment due to the change of the surface morphology and chemical composition of the films. The sensor prepared at 700 °C annealing temperature (WO2.83) has higher sensitivity towards acetone; as well, it has more rapid response and recovery times.

Original languageEnglish
Article number138659
JournalChemical Physics Letters
Volume776
DOIs
StatePublished - Aug 2021

Bibliographical note

Publisher Copyright:
© 2021 Elsevier B.V.

Keywords

  • Acetone
  • Gas sensor
  • Surface-modification
  • Thin film
  • Tungsten oxide

ASJC Scopus subject areas

  • General Physics and Astronomy
  • Physical and Theoretical Chemistry

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