STATISTICS FOR IMPROVEMENT OF IC PROCESS CONTROL.

Thaddeus J. Kobylarz; Frederic H. Herman; Albert J. Graf; Patrick C. Calella

STATISTICS FOR IMPROVEMENT OF IC PROCESS CONTROL.

Thaddeus J. Kobylarz^*, Frederic H. Herman, Albert J. Graf, Patrick C. Calella

^*Corresponding author for this work

King Fahd University of Petroleum & Minerals

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Abstract

The use of test patterns is a valuable vehicle for monitoring production of large scale integrated circuit wafers with respect to the expected systems performance of the circuits. A basic limitation in current procedures is the manner in which tested parameter data is extrapolated from test pattern locations to other chips on the wafer. This paper describes a new procedure based on a ″test″ wafer which enables one to develop a statistical algorithm for improved parameter extrapolation.

Original language	English
Pages	143-147
Number of pages	5
State	Published - 1974

ASJC Scopus subject areas

General Engineering

Cite this

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title = "STATISTICS FOR IMPROVEMENT OF IC PROCESS CONTROL.",

abstract = "The use of test patterns is a valuable vehicle for monitoring production of large scale integrated circuit wafers with respect to the expected systems performance of the circuits. A basic limitation in current procedures is the manner in which tested parameter data is extrapolated from test pattern locations to other chips on the wafer. This paper describes a new procedure based on a ″test″ wafer which enables one to develop a statistical algorithm for improved parameter extrapolation.",

author = "Kobylarz, {Thaddeus J.} and Herman, {Frederic H.} and Graf, {Albert J.} and Calella, {Patrick C.}",

year = "1974",

language = "English",

pages = "143--147",

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TY - CONF

T1 - STATISTICS FOR IMPROVEMENT OF IC PROCESS CONTROL.

AU - Kobylarz, Thaddeus J.

AU - Herman, Frederic H.

AU - Graf, Albert J.

AU - Calella, Patrick C.

PY - 1974

Y1 - 1974

N2 - The use of test patterns is a valuable vehicle for monitoring production of large scale integrated circuit wafers with respect to the expected systems performance of the circuits. A basic limitation in current procedures is the manner in which tested parameter data is extrapolated from test pattern locations to other chips on the wafer. This paper describes a new procedure based on a ″test″ wafer which enables one to develop a statistical algorithm for improved parameter extrapolation.

AB - The use of test patterns is a valuable vehicle for monitoring production of large scale integrated circuit wafers with respect to the expected systems performance of the circuits. A basic limitation in current procedures is the manner in which tested parameter data is extrapolated from test pattern locations to other chips on the wafer. This paper describes a new procedure based on a ″test″ wafer which enables one to develop a statistical algorithm for improved parameter extrapolation.

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M3 - Paper

AN - SCOPUS:0015960939

SP - 143

EP - 147

ER -

STATISTICS FOR IMPROVEMENT OF IC PROCESS CONTROL.

Abstract

ASJC Scopus subject areas

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