Solid state MEMS devices on flexible and semi-transparent silicon (100) platform

Sally M. Ahmed; Aftab M. Hussain; Jhonathan P. Rojas; Muhammad Mustafa Hussain

doi:10.1109/MEMSYS.2014.6765699

Solid state MEMS devices on flexible and semi-transparent silicon (100) platform

Sally M. Ahmed
, Aftab M. Hussain
, Jhonathan P. Rojas
, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

We report fabrication of MEMS thermal actuators on flexible and semi-transparent silicon fabric released from bulk silicon (100). We fabricated the devices first and then released the top portion of the silicon (≈ 19 μm) which is flexible and semi-transparent. We also performed chemical mechanical polishing to reuse the remaining wafer. A tested thermal actuator with 3 μm wide 240 μm hot arm and 10 μm wide 185 μm long cold arm deflected by 1.7 μm at 1 V. The fabricated thermal actuators exhibit similar performance before and after bending. We believe the demonstrated process will expand the horizon of flexible electronics into MEMS world devices.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	548-551
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765699
State	Published - 2014
Externally published	Yes

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Flexible electronics
Sacrificial layer
Structural layer
Thermal flexure actuator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765699

Cite this

Ahmed, S. M., Hussain, A. M., Rojas, J. P., & Hussain, M. M. (2014). Solid state MEMS devices on flexible and semi-transparent silicon (100) platform. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 548-551). Article 6765698 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765699

Ahmed, Sally M. ; Hussain, Aftab M. ; Rojas, Jhonathan P. et al. / Solid state MEMS devices on flexible and semi-transparent silicon (100) platform. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 548-551 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{9762a59115c8425890d4ae6b9891216f,

title = "Solid state MEMS devices on flexible and semi-transparent silicon (100) platform",

abstract = "We report fabrication of MEMS thermal actuators on flexible and semi-transparent silicon fabric released from bulk silicon (100). We fabricated the devices first and then released the top portion of the silicon (≈ 19 μm) which is flexible and semi-transparent. We also performed chemical mechanical polishing to reuse the remaining wafer. A tested thermal actuator with 3 μm wide 240 μm hot arm and 10 μm wide 185 μm long cold arm deflected by 1.7 μm at 1 V. The fabricated thermal actuators exhibit similar performance before and after bending. We believe the demonstrated process will expand the horizon of flexible electronics into MEMS world devices.",

keywords = "Flexible electronics, Sacrificial layer, Structural layer, Thermal flexure actuator",

author = "Ahmed, \{Sally M.\} and Hussain, \{Aftab M.\} and Rojas, \{Jhonathan P.\} and Hussain, \{Muhammad Mustafa\}",

year = "2014",

doi = "10.1109/MEMSYS.2014.6765699",

language = "English",

isbn = "9781479935086",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "548--551",

booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

address = "United States",

}

Ahmed, SM, Hussain, AM, Rojas, JP & Hussain, MM 2014, Solid state MEMS devices on flexible and semi-transparent silicon (100) platform. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765698, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 548-551. https://doi.org/10.1109/MEMSYS.2014.6765699

Solid state MEMS devices on flexible and semi-transparent silicon (100) platform. / Ahmed, Sally M.; Hussain, Aftab M.; Rojas, Jhonathan P. et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 548-551 6765698 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Solid state MEMS devices on flexible and semi-transparent silicon (100) platform

AU - Ahmed, Sally M.

AU - Hussain, Aftab M.

AU - Rojas, Jhonathan P.

AU - Hussain, Muhammad Mustafa

PY - 2014

Y1 - 2014

N2 - We report fabrication of MEMS thermal actuators on flexible and semi-transparent silicon fabric released from bulk silicon (100). We fabricated the devices first and then released the top portion of the silicon (≈ 19 μm) which is flexible and semi-transparent. We also performed chemical mechanical polishing to reuse the remaining wafer. A tested thermal actuator with 3 μm wide 240 μm hot arm and 10 μm wide 185 μm long cold arm deflected by 1.7 μm at 1 V. The fabricated thermal actuators exhibit similar performance before and after bending. We believe the demonstrated process will expand the horizon of flexible electronics into MEMS world devices.

AB - We report fabrication of MEMS thermal actuators on flexible and semi-transparent silicon fabric released from bulk silicon (100). We fabricated the devices first and then released the top portion of the silicon (≈ 19 μm) which is flexible and semi-transparent. We also performed chemical mechanical polishing to reuse the remaining wafer. A tested thermal actuator with 3 μm wide 240 μm hot arm and 10 μm wide 185 μm long cold arm deflected by 1.7 μm at 1 V. The fabricated thermal actuators exhibit similar performance before and after bending. We believe the demonstrated process will expand the horizon of flexible electronics into MEMS world devices.

KW - Flexible electronics

KW - Sacrificial layer

KW - Structural layer

KW - Thermal flexure actuator

UR - https://www.scopus.com/pages/publications/84898985471

U2 - 10.1109/MEMSYS.2014.6765699

DO - 10.1109/MEMSYS.2014.6765699

M3 - Conference contribution

AN - SCOPUS:84898985471

SN - 9781479935086

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 548

EP - 551

BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Ahmed SM, Hussain AM, Rojas JP, Hussain MM. Solid state MEMS devices on flexible and semi-transparent silicon (100) platform. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 548-551. 6765698. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765699

Solid state MEMS devices on flexible and semi-transparent silicon (100) platform

Abstract

Publication series

UN SDGs

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this