Abstract
Slit scattering of beam particles in a microbeam set-up becomes significant for low current applications and thus limits its lateral resolution and application potential. In this work, the angular and energy distributions of beam particles interacting with cylindrically shaped slit-jaws of different radii, surface roughnesses, and materials are calculated numerically, employing the computer code SRIM. To quantitatively investigate their effect on the beam spot quality of a microbeam set-up, a quality factor is proposed as an index to evaluate the effect of slit-scattered particles on the beam spot. The results of the investigation reveal a high sensitivity of slit scattering in relation to the slit-jaw surface roughness.
| Original language | English |
|---|---|
| Pages (from-to) | 402-417 |
| Number of pages | 16 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 225 |
| Issue number | 3 |
| DOIs | |
| State | Published - Sep 2004 |
Bibliographical note
Funding Information:The author would like to acknowledge the support of King Fahd University of Petroleum and Minerals through the Center for Applied Physical Sciences of the Research Institute. Many thanks are due to Dr. A.N. Shuaib for his substantial support in transforming this work into a readable manuscript. Thanks are due to Professor Frank Watt for providing experimental data. The contribution of the University Editing Board is also acknowledged.
Keywords
- Beam optics
- Microbeam
- Slit scattering
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation