Abstract
This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications.
| Original language | English |
|---|---|
| Title of host publication | 2013 Transducers and Eurosensors XXVII |
| Subtitle of host publication | The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
| Pages | 2636-2639 |
| Number of pages | 4 |
| DOIs | |
| State | Published - 2013 |
| Externally published | Yes |
Publication series
| Name | 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
|---|
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
Keywords
- Metal-Oxide-Semiconductor
- flexible electronics
- high performance flexible devices
- lithium-ion battery
- micro-thermoelectric generators
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
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