Silicon fabric for multi-functional applications

Galo Torres Sevilla; Jhonathan P. Rojas; Sally Ahmed; Aftab Hussain; Salman Bin Inayat; Muhammad M. Hussain

doi:10.1109/Transducers.2013.6627347

Silicon fabric for multi-functional applications

Galo Torres Sevilla, Jhonathan P. Rojas, Sally Ahmed, Aftab Hussain, Salman Bin Inayat, Muhammad M. Hussain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

18 Scopus citations

Abstract

This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	2636-2639
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6627347
State	Published - 2013
Externally published	Yes

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Keywords

Metal-Oxide-Semiconductor
flexible electronics
high performance flexible devices
lithium-ion battery
micro-thermoelectric generators

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/Transducers.2013.6627347

Cite this

Sevilla, G. T., Rojas, J. P., Ahmed, S., Hussain, A., Inayat, S. B., & Hussain, M. M. (2013). Silicon fabric for multi-functional applications. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2636-2639). Article 6627347 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627347

Sevilla, Galo Torres ; Rojas, Jhonathan P. ; Ahmed, Sally et al. / Silicon fabric for multi-functional applications. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 2636-2639 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

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title = "Silicon fabric for multi-functional applications",

abstract = "This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications.",

keywords = "Metal-Oxide-Semiconductor, flexible electronics, high performance flexible devices, lithium-ion battery, micro-thermoelectric generators",

author = "Sevilla, {Galo Torres} and Rojas, {Jhonathan P.} and Sally Ahmed and Aftab Hussain and Inayat, {Salman Bin} and Hussain, {Muhammad M.}",

year = "2013",

doi = "10.1109/Transducers.2013.6627347",

language = "English",

isbn = "9781467359818",

series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

pages = "2636--2639",

booktitle = "2013 Transducers and Eurosensors XXVII",

}

Sevilla, GT, Rojas, JP, Ahmed, S, Hussain, A, Inayat, SB & Hussain, MM 2013, Silicon fabric for multi-functional applications. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627347, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 2636-2639. https://doi.org/10.1109/Transducers.2013.6627347

Silicon fabric for multi-functional applications. / Sevilla, Galo Torres; Rojas, Jhonathan P.; Ahmed, Sally et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2636-2639 6627347 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Inayat, Salman Bin

AU - Hussain, Muhammad M.

PY - 2013

Y1 - 2013

N2 - This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications.

AB - This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications.

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KW - high performance flexible devices

KW - lithium-ion battery

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M3 - Conference contribution

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T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

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Sevilla GT, Rojas JP, Ahmed S, Hussain A, Inayat SB, Hussain MM. Silicon fabric for multi-functional applications. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2636-2639. 6627347. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). doi: 10.1109/Transducers.2013.6627347

Silicon fabric for multi-functional applications

Abstract

Publication series

Keywords

ASJC Scopus subject areas

UN SDGs

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