Sensitive resonant gas sensor operating in air with metal organic frameworks coating

N. Jaber; S. Ilyas; O. Shekhah; M. Eddaoudi; M. I. Younis

doi:10.1109/TRANSDUCERS.2017.7994240

Sensitive resonant gas sensor operating in air with metal organic frameworks coating

N. Jaber, S. Ilyas, O. Shekhah, M. Eddaoudi, M. I. Younis^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1081-1087
Number of pages	7
ISBN (Electronic)	9781538627310
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994240
State	Published - 26 Jul 2017
Externally published	Yes

Publication series

Name	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Keywords

Gas detection
electrostatic actuation
selectivity and resonators

ASJC Scopus subject areas

Chemical Health and Safety
Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2017.7994240

Cite this

Jaber, N., Ilyas, S., Shekhah, O., Eddaoudi, M., & Younis, M. I. (2017). Sensitive resonant gas sensor operating in air with metal organic frameworks coating. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1081-1087). Article 7994240 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994240

Jaber, N. ; Ilyas, S. ; Shekhah, O. et al. / Sensitive resonant gas sensor operating in air with metal organic frameworks coating. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1081-1087 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

@inproceedings{4269440c99f24db9b813950d945ef3b3,

title = "Sensitive resonant gas sensor operating in air with metal organic frameworks coating",

abstract = "We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.",

keywords = "Gas detection, electrostatic actuation, selectivity and resonators",

author = "N. Jaber and S. Ilyas and O. Shekhah and M. Eddaoudi and Younis, \{M. I.\}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.",

year = "2017",

month = jul,

day = "26",

doi = "10.1109/TRANSDUCERS.2017.7994240",

language = "English",

series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1081--1087",

booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

address = "United States",

}

Jaber, N, Ilyas, S, Shekhah, O, Eddaoudi, M & Younis, MI 2017, Sensitive resonant gas sensor operating in air with metal organic frameworks coating. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994240, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 1081-1087. https://doi.org/10.1109/TRANSDUCERS.2017.7994240

Sensitive resonant gas sensor operating in air with metal organic frameworks coating. / Jaber, N.; Ilyas, S.; Shekhah, O. et al.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1081-1087 7994240 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Sensitive resonant gas sensor operating in air with metal organic frameworks coating

AU - Jaber, N.

AU - Ilyas, S.

AU - Shekhah, O.

AU - Eddaoudi, M.

AU - Younis, M. I.

PY - 2017/7/26

Y1 - 2017/7/26

N2 - We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.

AB - We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.

KW - Gas detection

KW - electrostatic actuation

KW - selectivity and resonators

UR - https://www.scopus.com/pages/publications/85029351704

U2 - 10.1109/TRANSDUCERS.2017.7994240

DO - 10.1109/TRANSDUCERS.2017.7994240

M3 - Conference contribution

AN - SCOPUS:85029351704

T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 1081

EP - 1087

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Jaber N, Ilyas S, Shekhah O, Eddaoudi M, Younis MI. Sensitive resonant gas sensor operating in air with metal organic frameworks coating. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1081-1087. 7994240. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/TRANSDUCERS.2017.7994240

Sensitive resonant gas sensor operating in air with metal organic frameworks coating

Abstract

Publication series

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this