Abstract
We report the room temperature detection of low concentration (few hundred ppm) of hydrogen using sputtered tin oxide (SnO2) thin films catalyzed by ultra-thin layer of platinum (Pt), followed by argon annealing at different temperatures from 150 °C to 600 °C. Structural, morphological, optical, compositional, and gas sensing properties of the fabricated films were investigated. The results show that the gas sensing properties of the heated Pt/SnO2 sensors at room temperature was enhanced as compared to the as-deposited Pt/SnO2, and pristine SnO2 sensors. The maximum response is observed at the post-annealing in the temperature range between 150 and 300 °C. In particular, the sensor annealed at 150 °C, show excellent response, high selectivity, reasonable response and recovery time, as well as high long-term stability for hydrogen detection at room temperature. A plausible mechanism for the observed enhancement in the sensing performance towards hydrogen is proposed.
| Original language | English |
|---|---|
| Pages (from-to) | 68-77 |
| Number of pages | 10 |
| Journal | Vacuum |
| Volume | 156 |
| DOIs | |
| State | Published - Oct 2018 |
Bibliographical note
Publisher Copyright:© 2018
Keywords
- Hydrogen sensor
- Sensing mechanism
- Sputtering
- Thin films
- Tin oxide
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films