Abstract
High- Q (quality factor) resonators are a versatile class of components for radio frequency micro-electromechanical systems. Phononic crystals provide a promising method of producing these resonators. In this article, we present a theoretical study of the Q factor of a cavity resonator in a two-dimensional phononic crystal comprised of tungsten rods in a silicon matrix. One can optimize the Q of a phononic crystal resonator by varying the number of inclusions or the cavity harmonic number. We conclude that using higher harmonics marginally increases Q while increasing crystal length via additional inclusions causes Q to increase by orders of magnitude. Incorporating loss into the model shows that the silicon material limit on Q is achievable using a two-dimensional phononic crystal design with a reasonable length. With five layers of inclusions on either side of the cavity, the material limit on Q is achieved, regardless of the harmonic number.
| Original language | English |
|---|---|
| Article number | 084505 |
| Journal | Journal of Applied Physics |
| Volume | 108 |
| Issue number | 8 |
| DOIs | |
| State | Published - 15 Oct 2010 |
| Externally published | Yes |
Bibliographical note
Funding Information:This work was supported by the Laboratory Directed Research and Development program at Sandia National Laboratories. Sandia National Laboratories is a multiprogram laboratory operated by the Sandia Corporation, Lockheed Martin Co., for the United States Department of Energy’s National Nuclear Security Administration under Contract No. DE-AC04-94AL85000.
ASJC Scopus subject areas
- General Physics and Astronomy