Realization of a 33 GHz phononic crystal fabricated in a freestanding membrane

Drew F. Goettler*, Mehmet F. Su, Charles M. Reinke, Seyedhamidreza Alaie, Patrick E. Hopkins, Roy H. Olsson, Ihab El-Kady, Zayd C. Leseman

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

Phononic crystals (PnCs) are man-made structures with periodically varying material properties such as density, ρ, and elastic modulus, E. Periodic variations of the material properties with nanoscale characteristic dimensions yield PnCs that operate at frequencies above 10 GHz, allowing for the manipulation of thermal properties. In this article, a 2D simple cubic lattice PnC operating at 33 GHz is reported. The PnC is created by nanofabrication with a focused ion beam. A freestanding membrane of silicon is ion milled to create a simple cubic array of 32 nm diameter holes that are subsequently backfilled with tungsten to create inclusions at a spacing of 100 nm. Simulations are used to predict the operating frequency of the PnC. Additional modeling shows that milling a freestanding membrane has a unique characteristic; the exit via has a conical shape, or trumpet-like appearance.

Original languageEnglish
Article number042001
JournalAIP Advances
Volume1
Issue number4
DOIs
StatePublished - 2011
Externally publishedYes

Bibliographical note

Funding Information:
DFG, MFS, SA, and ZCL would like to thank the Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Contract No. DE - FG02 - 10ER46720 (Drs. Kortan and Fitzsimmons), and the National Science Foundation under Grant No. CMMI 1056077 (Dr. Eduardo Misawa). This work was also supported by the Laboratory Directed Research and Development program at Sandia National Laboratories. Sandia National Laboratories is a multiprogram laboratory operated by the Sandia Corporation, Lockheed Martin Company, for the United States Department of Energy's National Nuclear Security Administration under Contract No. DE-AC04-94AL85000. Portions of the work were carried out in UNM's Manufacturing Training and Technology Center and UNM's Nano Synthesis Facility.

ASJC Scopus subject areas

  • General Physics and Astronomy

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