Prospect of New AFM Probe Design Enabled by Stress Gradient

Omar Alshehri; Majed Al-Ghamdi; Mohamed Arabi; Mahmoud Khater; Maher Bakri-Kassem; David Yevick

doi:10.1109/Transducers50396.2021.9495541

Prospect of New AFM Probe Design Enabled by Stress Gradient

Omar Alshehri, Majed Al-Ghamdi, Mohamed Arabi, Mahmoud Khater, Maher Bakri-Kassem, David Yevick

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Fabrication recipes usually are designed to eliminate residual stress, while majority of electrostatic models considers fringing field to be negligible. The work presented here tries to make a benefit of these two to make a new design for an AFM probe. The curvature caused by residual stress was experimentally exported from profilometer into COMSOL to show the effect of curvature on the probe's static behavior (under DC voltage) at two different beam lengths. The results show that the curvature could turn the forcing on the probe from repulsive to attractive, which is analogues to results in existing literature.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	643-646
Number of pages	4
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495541
State	Published - 20 Jun 2021

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

Keywords

AFM probe
Curved Cantilever
Fringing Field Force
Out-of-Plane Actuation
Residual Stress
Stress Gradient

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Control and Optimization
Instrumentation

Access to Document

10.1109/Transducers50396.2021.9495541

Cite this

Alshehri, O., Al-Ghamdi, M., Arabi, M., Khater, M., Bakri-Kassem, M., & Yevick, D. (2021). Prospect of New AFM Probe Design Enabled by Stress Gradient. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 643-646). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495541

Alshehri, Omar ; Al-Ghamdi, Majed ; Arabi, Mohamed et al. / Prospect of New AFM Probe Design Enabled by Stress Gradient. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 643-646 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

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abstract = "Fabrication recipes usually are designed to eliminate residual stress, while majority of electrostatic models considers fringing field to be negligible. The work presented here tries to make a benefit of these two to make a new design for an AFM probe. The curvature caused by residual stress was experimentally exported from profilometer into COMSOL to show the effect of curvature on the probe's static behavior (under DC voltage) at two different beam lengths. The results show that the curvature could turn the forcing on the probe from repulsive to attractive, which is analogues to results in existing literature.",

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Alshehri, O, Al-Ghamdi, M, Arabi, M, Khater, M, Bakri-Kassem, M & Yevick, D 2021, Prospect of New AFM Probe Design Enabled by Stress Gradient. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 643-646. https://doi.org/10.1109/Transducers50396.2021.9495541

Prospect of New AFM Probe Design Enabled by Stress Gradient. / Alshehri, Omar; Al-Ghamdi, Majed; Arabi, Mohamed et al.
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 643-646 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Alshehri O, Al-Ghamdi M, Arabi M, Khater M, Bakri-Kassem M, Yevick D. Prospect of New AFM Probe Design Enabled by Stress Gradient. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 643-646. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495541

Prospect of New AFM Probe Design Enabled by Stress Gradient

Abstract

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Bibliographical note

Keywords

ASJC Scopus subject areas

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