Pressure effect on the growth of oxide layers on germanium substrates

J. Al-Sadah; N. Tabet; M. Salim

doi:10.1016/S0368-2048(00)00368-6

Pressure effect on the growth of oxide layers on germanium substrates

J. Al-Sadah^*
, N. Tabet
, M. Salim

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

X-ray Photoelectron Spectroscopy (XPS) was used to investigate the growth of thin oxide layers obtained by dry oxidation on (011) germanium substrates. The heat treatments were carried out, in-situ, at T = 380 °C under various values of air pressure. The quantitative analysis of the XPS spectra suggests the growth of non uniform oxide layers. An apparent thickness of the oxide film was defined as function of the fraction of the oxidized surface and of the actual thickness of the oxide islands. The results show a quasi linear dependence of the apparent thickness versus the air pressure.

Original language	English
Pages (from-to)	409-414
Number of pages	6
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	114-116
DOIs	https://doi.org/10.1016/S0368-2048(00)00368-6
State	Published - Mar 2001

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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10.1016/S0368-2048(00)00368-6

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title = "Pressure effect on the growth of oxide layers on germanium substrates",

abstract = "X-ray Photoelectron Spectroscopy (XPS) was used to investigate the growth of thin oxide layers obtained by dry oxidation on (011) germanium substrates. The heat treatments were carried out, in-situ, at T = 380 °C under various values of air pressure. The quantitative analysis of the XPS spectra suggests the growth of non uniform oxide layers. An apparent thickness of the oxide film was defined as function of the fraction of the oxidized surface and of the actual thickness of the oxide islands. The results show a quasi linear dependence of the apparent thickness versus the air pressure.",

author = "J. Al-Sadah and N. Tabet and M. Salim",

year = "2001",

month = mar,

doi = "10.1016/S0368-2048(00)00368-6",

language = "English",

volume = "114-116",

pages = "409--414",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Pressure effect on the growth of oxide layers on germanium substrates

AU - Al-Sadah, J.

AU - Tabet, N.

AU - Salim, M.

PY - 2001/3

Y1 - 2001/3

N2 - X-ray Photoelectron Spectroscopy (XPS) was used to investigate the growth of thin oxide layers obtained by dry oxidation on (011) germanium substrates. The heat treatments were carried out, in-situ, at T = 380 °C under various values of air pressure. The quantitative analysis of the XPS spectra suggests the growth of non uniform oxide layers. An apparent thickness of the oxide film was defined as function of the fraction of the oxidized surface and of the actual thickness of the oxide islands. The results show a quasi linear dependence of the apparent thickness versus the air pressure.

AB - X-ray Photoelectron Spectroscopy (XPS) was used to investigate the growth of thin oxide layers obtained by dry oxidation on (011) germanium substrates. The heat treatments were carried out, in-situ, at T = 380 °C under various values of air pressure. The quantitative analysis of the XPS spectra suggests the growth of non uniform oxide layers. An apparent thickness of the oxide film was defined as function of the fraction of the oxidized surface and of the actual thickness of the oxide islands. The results show a quasi linear dependence of the apparent thickness versus the air pressure.

UR - https://www.scopus.com/pages/publications/0035277024

U2 - 10.1016/S0368-2048(00)00368-6

DO - 10.1016/S0368-2048(00)00368-6

M3 - Conference article

AN - SCOPUS:0035277024

SN - 0368-2048

VL - 114-116

SP - 409

EP - 414

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

ER -

Pressure effect on the growth of oxide layers on germanium substrates

Abstract

ASJC Scopus subject areas

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