Parametric amplification of the signals in the electrostatic graviinertial sensor

The challenges of designing simple, reliable, and high sensitivity graviinertial sensors are investigated. The sensor comprises a proof mass (PM) and is fixed with the housing by the elastic torsion suspension. PM makes small rotations under the action of gravitational forces or inertial forces. The distinctive features of the sensor are that the differential electrostatic system provides simultaneous reading of the desired signal and a control the torsional rigidity of suspension. In addition, the PM's rotational angular velocity transforms in the alternating current flowing through the capacitors. The presence of.lternating current (AC) voltage sources allows to get the parametric amplification of AC and significantly to improve the sensitivity of the sensor. In the simplest case, the sensor does not contain any feedback circuits. As an example, calculations of the micromechanical linear accelerations confirm that the periodic modulation of the coefficient of elastic stiffness of the