Optical properties of chromium oxide thin films deposited by electron-beam evaporation

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103 Scopus citations

Abstract

Thin films of chromium oxide were deposited by electron-beam evaporation. The effects of substrate temperature on the structural, chemical and optical properties of the films were investigated. Films deposited on unheated substrates were amorphous and almost stoichiometric, whereas those deposited at 300 °C had microcrystallites embedded in an amorphous matrix and were less stoichiometric. The optical properties of the films were derived from transmittance measurements. It was found that the refractive index, the extinction coefficient and the optical bandgap all increased with substrate temperature.

Original languageEnglish
Pages (from-to)709-713
Number of pages5
JournalOptical Materials
Volume29
Issue number6
DOIs
StatePublished - Feb 2007

Bibliographical note

Funding Information:
The authors acknowledge the support of this work by the Physics Department and the Research Institute of KFUPM.

Keywords

  • Chromium oxide
  • Optical constants
  • Optical properties
  • Substrate temperature
  • Transmittance
  • XPS
  • XRD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • General Computer Science
  • Atomic and Molecular Physics, and Optics
  • Spectroscopy
  • Physical and Theoretical Chemistry
  • Organic Chemistry
  • Inorganic Chemistry
  • Electrical and Electronic Engineering

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