On the structure of deposited diamond-like carbon films produced by Rf (13.56MHz) CH4 plasma

  • M. Ouchabane*
  • , M. Kechouane
  • , K. Henda
  • , H. Salah
  • , B. Touchrift
  • , N. Tabet
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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