On the structure of deposited diamond-like carbon films produced by Rf (13.56MHz) CH₄ plasma

M. Ouchabane^*, M. Kechouane, K. Henda, H. Salah, B. Touchrift, N. Tabet

^*Corresponding author for this work

King Fahd University of Petroleum & Minerals

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Engineering

Material Science