Abstract
We discuss the creation of nano-sized protrusions on insulating surfaces using slow highly charged ions. This method holds the promise of forming regular structures on surfaces without inducing defects in deeper lying crystal layers. We find that only projectiles with a potential energy above a critical value are able to create hillocks. Below this threshold no surface modification is observed. This is similar to the track and hillock formation induced by swift (∼GeV) heavy ions. We present a model for the conversion of potential energy stored in the projectiles into target-lattice excitations (heat) and discuss the possibility to create ordered structures using the guiding effect observed in insulating conical structures.
| Original language | English |
|---|---|
| Pages (from-to) | 1398-1404 |
| Number of pages | 7 |
| Journal | Solid-State Electronics |
| Volume | 51 |
| Issue number | 10 SPEC. ISS |
| DOIs | |
| State | Published - Oct 2007 |
| Externally published | Yes |
Bibliographical note
Funding Information:This work has been supported by Austrian Science Foundation FWF (Projects Nos. 17449 and M894-N02). The irradiation experiments were performed at the distributed ITS LEIF infrastructure at MPI Heidelberg Germany, supported by Transnational Access Granted by the European Project RII3/026015.
Keywords
- Hillock formation
- Ion-insulator interactions
- Nanostructuring
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry
- Electrical and Electronic Engineering