Nonlinear parameter identification of a resonant electrostatic MEMS actuator

Majed S. Al-Ghamdi; Ayman M. Alneamy; Sangtak Park; Beichen Li; Mahmoud E. Khater; Eihab M. Abdel-Rahman; Glenn R. Heppler; Mustafa Yavuz

doi:10.3390/s17051121

Nonlinear parameter identification of a resonant electrostatic MEMS actuator

Majed S. Al-Ghamdi
, Ayman M. Alneamy
, Sangtak Park
, Beichen Li
, Mahmoud E. Khater
, Eihab M. Abdel-Rahman^*
, Glenn R. Heppler
, Mustafa Yavuz

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.

Original language	English
Article number	1121
Journal	Sensors (Switzerland)
Volume	17
Issue number	5
DOIs	https://doi.org/10.3390/s17051121
State	Published - 13 May 2017

Bibliographical note

Publisher Copyright:
© 2017 by the authors. Licensee MDPI, Basel, Switzerland.

Keywords

Electrostatic MEMS
Measurement noise
Parameter identification
Primary resonance
Process noise
Secondary resonances

ASJC Scopus subject areas

Analytical Chemistry
Information Systems
Atomic and Molecular Physics, and Optics
Biochemistry
Instrumentation
Electrical and Electronic Engineering

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Cite this

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title = "Nonlinear parameter identification of a resonant electrostatic MEMS actuator",

abstract = "We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.",

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AU - Al-Ghamdi, Majed S.

AU - Alneamy, Ayman M.

AU - Park, Sangtak

AU - Li, Beichen

AU - Khater, Mahmoud E.

AU - Abdel-Rahman, Eihab M.

AU - Heppler, Glenn R.

AU - Yavuz, Mustafa

PY - 2017/5/13

Y1 - 2017/5/13

N2 - We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.

AB - We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.

KW - Electrostatic MEMS

KW - Measurement noise

KW - Parameter identification

KW - Primary resonance

KW - Process noise

KW - Secondary resonances

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SN - 1424-8220

VL - 17

JO - Sensors (Switzerland)

JF - Sensors (Switzerland)

IS - 5

M1 - 1121

ER -

Nonlinear parameter identification of a resonant electrostatic MEMS actuator

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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