Nonlinear-based switch triggered by gas using electrostatically actuated microbeams

Adam Bouchaala; Omar Yassine; Mohamed Eddaoudi; Nizar Jaber; Osama Shekhah; Mohammad I. Younis

doi:10.1115/DETC2016-59815.pdf

Nonlinear-based switch triggered by gas using electrostatically actuated microbeams

Adam Bouchaala
, Omar Yassine
, Mohamed Eddaoudi
, Nizar Jaber
, Osama Shekhah
, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.

Original language	English
Title of host publication	21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791850145
DOIs	https://doi.org/10.1115/DETC2016-59815.pdf
State	Published - 2016
Externally published	Yes

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	4

Bibliographical note

Publisher Copyright:
Copyright © 2016 by ASME.

ASJC Scopus subject areas

Mechanical Engineering
Computer Graphics and Computer-Aided Design
Computer Science Applications
Modeling and Simulation

Access to Document

10.1115/DETC2016-59815.pdf

Cite this

Bouchaala, A., Yassine, O., Eddaoudi, M., Jaber, N., Shekhah, O., & Younis, M. I. (2016). Nonlinear-based switch triggered by gas using electrostatically actuated microbeams. In 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2016-59815.pdf

Bouchaala, Adam ; Yassine, Omar ; Eddaoudi, Mohamed et al. / Nonlinear-based switch triggered by gas using electrostatically actuated microbeams. 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2016. (Proceedings of the ASME Design Engineering Technical Conference).

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title = "Nonlinear-based switch triggered by gas using electrostatically actuated microbeams",

abstract = "The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.",

author = "Adam Bouchaala and Omar Yassine and Mohamed Eddaoudi and Nizar Jaber and Osama Shekhah and Younis, \{Mohammad I.\}",

note = "Publisher Copyright: Copyright {\textcopyright} 2016 by ASME.",

year = "2016",

doi = "10.1115/DETC2016-59815.pdf",

language = "English",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

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Bouchaala, A, Yassine, O, Eddaoudi, M, Jaber, N, Shekhah, O & Younis, MI 2016, Nonlinear-based switch triggered by gas using electrostatically actuated microbeams. in 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2016-59815.pdf

Nonlinear-based switch triggered by gas using electrostatically actuated microbeams. / Bouchaala, Adam; Yassine, Omar; Eddaoudi, Mohamed et al.
21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2016. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Nonlinear-based switch triggered by gas using electrostatically actuated microbeams

AU - Bouchaala, Adam

AU - Yassine, Omar

AU - Eddaoudi, Mohamed

AU - Jaber, Nizar

AU - Shekhah, Osama

AU - Younis, Mohammad I.

PY - 2016

Y1 - 2016

N2 - The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.

AB - The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.

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T3 - Proceedings of the ASME Design Engineering Technical Conference

BT - 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems

PB - American Society of Mechanical Engineers (ASME)

ER -

Bouchaala A, Yassine O, Eddaoudi M, Jaber N, Shekhah O, Younis MI. Nonlinear-based switch triggered by gas using electrostatically actuated microbeams. In 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME). 2016. (Proceedings of the ASME Design Engineering Technical Conference). doi: 10.1115/DETC2016-59815.pdf

Nonlinear-based switch triggered by gas using electrostatically actuated microbeams

Abstract

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Bibliographical note

ASJC Scopus subject areas

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