Abstract
Ceramic materials have been fabricated using various forming processes for its great promise in applications where the operating conditions are harsh. However, there has been hardly research work invested to produce freestanding ceramic components for micro-electromechanical systems applications. This chapter discusses the soft lithography as a robust process for the fabrication of freestanding micro-ceramic components. The aim is to fill the technical gap in precision fabrication by developing a high-quality ceramic micro-fabrication approach suitable for mass production. The research can be divided into three main sections. In the first section, fabrication processes of high-precision hard and soft molds were studied and optimized. In the second section, different slurry systems to fill soft molds were evaluated. Finally, characterization of the sintered parts is included with the aim to find the proper composition and processing parameters.
| Original language | English |
|---|---|
| Title of host publication | Micromanufacturing Engineering and Technology |
| Publisher | Elsevier |
| Pages | 295-311 |
| Number of pages | 17 |
| ISBN (Electronic) | 9780443154492 |
| ISBN (Print) | 9780443154508 |
| DOIs | |
| State | Published - 1 Jan 2025 |
| Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2026 Elsevier Inc. All rights reserved.
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
Keywords
- Ceramic
- MEMS
- Micro-components
- Net shape
- Soft lithography
ASJC Scopus subject areas
- General Engineering
- General Materials Science
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