Abstract
Direct nanobonding of p-Si/n-GaAs wafers based on surface activation that uses an Argon (Ar)-fast atom beam at room temperature has been investigated. The bonding strength of the interface was 14.4 MPa at room temperature, and remained nearly constant after annealing up to 600°C. An amorphous layer with a thickness of 11.5 nm was found across the interface without annealing. After annealing, the electrical current-voltage (I-V) characteristics were improved and the amorphous layer was diminished across the interface. The thermal stability of the interfacial properties of Si/GaAs indicates its potential use on the fabrication of multi-junction solar cells with Si substrate to lower the cost while improving the solar cells' efficiency. The thickness dependence of p-Si/n-Si interfacial I-V characteristics using COMSOL simulation indicates the decrease of breakdown voltage and current with the increase of the junction thickness.
| Original language | English |
|---|---|
| Title of host publication | Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications |
| Publisher | Electrochemical Society Inc. |
| Pages | 3-10 |
| Number of pages | 8 |
| Edition | 2 |
| ISBN (Electronic) | 9781607682134 |
| ISBN (Print) | 9781566778633 |
| DOIs | |
| State | Published - 2011 |
| Externally published | Yes |
Publication series
| Name | ECS Transactions |
|---|---|
| Number | 2 |
| Volume | 35 |
| ISSN (Print) | 1938-5862 |
| ISSN (Electronic) | 1938-6737 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
ASJC Scopus subject areas
- General Engineering
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