TY - GEN
T1 - Nano FIBrication OF ultra high aspect ratio vias in silicon
AU - Goettler, Drew
AU - Su, Mehmet
AU - Olsson, Roy
AU - Bruce Burckel, D.
AU - El-Kady, Ihab
AU - Leseman, Zayd
PY - 2010
Y1 - 2010
N2 - In this paper we present both experimental and theoretical results showing the effective use of material shaping to fabricate ultra-high-Aspect-ratio (UHAR) vias with a focused ion beam (FIB). With this technique, one can create vias with aspect ratios of 20:1 and higher. This is achieved by placing a 'lower sputter rate' material on top of a 'higher sputter rate' material. We model the FIB as a Gaussian beam with an angular dependent sputter rate. With our model we predict a high sputter rate ratio (high/low) can achieve vias with aspect ratios near 20:1. Experimental results support this prediction. By placing a thin layer of pyrolyzed carbon on top of silicon, we fabricated UHAR vias with diameters of 75 nm.
AB - In this paper we present both experimental and theoretical results showing the effective use of material shaping to fabricate ultra-high-Aspect-ratio (UHAR) vias with a focused ion beam (FIB). With this technique, one can create vias with aspect ratios of 20:1 and higher. This is achieved by placing a 'lower sputter rate' material on top of a 'higher sputter rate' material. We model the FIB as a Gaussian beam with an angular dependent sputter rate. With our model we predict a high sputter rate ratio (high/low) can achieve vias with aspect ratios near 20:1. Experimental results support this prediction. By placing a thin layer of pyrolyzed carbon on top of silicon, we fabricated UHAR vias with diameters of 75 nm.
UR - https://www.scopus.com/pages/publications/84881448290
U2 - 10.1115/IMECE2010-38956
DO - 10.1115/IMECE2010-38956
M3 - Conference contribution
AN - SCOPUS:84881448290
SN - 9780791844472
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 561
EP - 564
BT - ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Y2 - 12 November 2010 through 18 November 2010
ER -