Mode II adhesion energy analysis of stiction-failed poly-Si μ cantilevers using a MEMS load cell

Behnam Kheyraddini Mousavi; Arash Kheyraddini Mousavi; Tyler Jordan Hieber; James Chen; Zayd Chad Leseman

doi:10.1088/1361-6439/ab173e

Mode II adhesion energy analysis of stiction-failed poly-Si μ cantilevers using a MEMS load cell

Behnam Kheyraddini Mousavi
, Arash Kheyraddini Mousavi^*
, Tyler Jordan Hieber
, James Chen
, Zayd Chad Leseman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

This paper studies the Mode II adhesion energy of a Poly-Si ìcantilever stiction failed on a poly-Si substrate. A custom flexural microelectromechanical systems (MEMS) load cell and an interferometer are used to measure the applied forces and measure the deflections in real time. From this data the Mode II strain energy release rates were determined to range between 0.520-5.10 mJ m^-2.

Original language	English
Article number	075013
Journal	Journal of Micromechanics and Microengineering
Volume	29
Issue number	7
DOIs	https://doi.org/10.1088/1361-6439/ab173e
State	Published - 31 May 2019
Externally published	Yes

Bibliographical note

Publisher Copyright:
© 2019 IOP Publishing Ltd.

Keywords

MEMS
Mode II
adhesion energy
critical strain energy release rate
stiction failure

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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Cite this

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title = "Mode II adhesion energy analysis of stiction-failed poly-Si μ cantilevers using a MEMS load cell",

abstract = "This paper studies the Mode II adhesion energy of a Poly-Si {\`i}cantilever stiction failed on a poly-Si substrate. A custom flexural microelectromechanical systems (MEMS) load cell and an interferometer are used to measure the applied forces and measure the deflections in real time. From this data the Mode II strain energy release rates were determined to range between 0.520-5.10 mJ m-2.",

keywords = "MEMS, Mode II, adhesion energy, critical strain energy release rate, stiction failure",

author = "Mousavi, \{Behnam Kheyraddini\} and Mousavi, \{Arash Kheyraddini\} and Hieber, \{Tyler Jordan\} and James Chen and Leseman, \{Zayd Chad\}",

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AU - Mousavi, Behnam Kheyraddini

AU - Mousavi, Arash Kheyraddini

AU - Hieber, Tyler Jordan

AU - Chen, James

AU - Leseman, Zayd Chad

PY - 2019/5/31

Y1 - 2019/5/31

N2 - This paper studies the Mode II adhesion energy of a Poly-Si ìcantilever stiction failed on a poly-Si substrate. A custom flexural microelectromechanical systems (MEMS) load cell and an interferometer are used to measure the applied forces and measure the deflections in real time. From this data the Mode II strain energy release rates were determined to range between 0.520-5.10 mJ m-2.

AB - This paper studies the Mode II adhesion energy of a Poly-Si ìcantilever stiction failed on a poly-Si substrate. A custom flexural microelectromechanical systems (MEMS) load cell and an interferometer are used to measure the applied forces and measure the deflections in real time. From this data the Mode II strain energy release rates were determined to range between 0.520-5.10 mJ m-2.

KW - MEMS

KW - Mode II

KW - adhesion energy

KW - critical strain energy release rate

KW - stiction failure

UR - https://www.scopus.com/pages/publications/85068804430

U2 - 10.1088/1361-6439/ab173e

DO - 10.1088/1361-6439/ab173e

M3 - Article

AN - SCOPUS:85068804430

SN - 0960-1317

VL - 29

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7

M1 - 075013

ER -

Mode II adhesion energy analysis of stiction-failed poly-Si μ cantilevers using a MEMS load cell

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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