Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance

Seyedhamidreza Alaie; Drew F. Goettler; Khawar Abbas; Mehmet F. Su; Charles M. Reinke; Ihab El-Kady; Zayd C. Leseman

doi:10.1063/1.4824076

Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance

Seyedhamidreza Alaie
, Drew F. Goettler
, Khawar Abbas
, Mehmet F. Su
, Charles M. Reinke
, Ihab El-Kady
, Zayd C. Leseman

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

A technique based on suspended islands is described to measure the in-plane thermal conductivity of thin films and nano-structured materials, and is also employed for measurements of several samples with a single measurement platform. Using systematic steps for measurements, the characterization of the thermal resistances of a sample and its contacts are studied. The calibration of the contacts in this method is independent of the geometry, size, materials, and uniformity of contacts. To verify the technique, two different Si samples with different thicknesses and two samples of the same SiN_x wafer are characterized on a single device. One of the Si samples is also characterized by another technique, which verifies the current results. Characterization of the two SiN_x samples taken from the same wafer showed less than 1% difference in the measured thermal conductivities, indicating the precision of the method. Additionally, one of the SiN_x samples is characterized and then demounted, remounted, and characterized for a second time. The comparison showed the change in the thermal resistance of the contact in multiple measurements could be as small as 0.2 K/μW, if a similar sample is used.

Original language	English
Article number	105003
Journal	Review of Scientific Instruments
Volume	84
Issue number	10
DOIs	https://doi.org/10.1063/1.4824076
State	Published - Oct 2013
Externally published	Yes

Bibliographical note

Funding Information:
This work was supported by the Office of Basic Energy Sciences, Division of Materials Sciences and Engineering Experimental Program to Stimulate Competitive Research (EPSCoR) under Award No. DE-FG02-10ER46720. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy's National Nuclear Security Administration under contract No. DE-AC04-94AL85000. The authors would also like to acknowledge the contributions of Dr. Ying-Bing Jiang and the support given by the Manufacturing Training and Technology Center at the University of New Mexico.

ASJC Scopus subject areas

Instrumentation

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10.1063/1.4824076

Cite this

Alaie, S., Goettler, D. F., Abbas, K., Su, M. F., Reinke, C. M., El-Kady, I., & Leseman, Z. C. (2013). Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance. Review of Scientific Instruments, 84(10), Article 105003. https://doi.org/10.1063/1.4824076

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title = "Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance",

abstract = "A technique based on suspended islands is described to measure the in-plane thermal conductivity of thin films and nano-structured materials, and is also employed for measurements of several samples with a single measurement platform. Using systematic steps for measurements, the characterization of the thermal resistances of a sample and its contacts are studied. The calibration of the contacts in this method is independent of the geometry, size, materials, and uniformity of contacts. To verify the technique, two different Si samples with different thicknesses and two samples of the same SiNx wafer are characterized on a single device. One of the Si samples is also characterized by another technique, which verifies the current results. Characterization of the two SiNx samples taken from the same wafer showed less than 1\% difference in the measured thermal conductivities, indicating the precision of the method. Additionally, one of the SiNx samples is characterized and then demounted, remounted, and characterized for a second time. The comparison showed the change in the thermal resistance of the contact in multiple measurements could be as small as 0.2 K/μW, if a similar sample is used.",

author = "Seyedhamidreza Alaie and Goettler, \{Drew F.\} and Khawar Abbas and Su, \{Mehmet F.\} and Reinke, \{Charles M.\} and Ihab El-Kady and Leseman, \{Zayd C.\}",

note = "Funding Information: This work was supported by the Office of Basic Energy Sciences, Division of Materials Sciences and Engineering Experimental Program to Stimulate Competitive Research (EPSCoR) under Award No. DE-FG02-10ER46720. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy's National Nuclear Security Administration under contract No. DE-AC04-94AL85000. The authors would also like to acknowledge the contributions of Dr. Ying-Bing Jiang and the support given by the Manufacturing Training and Technology Center at the University of New Mexico.",

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doi = "10.1063/1.4824076",

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Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance. / Alaie, Seyedhamidreza; Goettler, Drew F.; Abbas, Khawar et al.
In: Review of Scientific Instruments, Vol. 84, No. 10, 105003, 10.2013.

Research output: Contribution to journal › Article › peer-review

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AU - Alaie, Seyedhamidreza

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AU - Reinke, Charles M.

AU - El-Kady, Ihab

AU - Leseman, Zayd C.

N1 - Funding Information: This work was supported by the Office of Basic Energy Sciences, Division of Materials Sciences and Engineering Experimental Program to Stimulate Competitive Research (EPSCoR) under Award No. DE-FG02-10ER46720. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy's National Nuclear Security Administration under contract No. DE-AC04-94AL85000. The authors would also like to acknowledge the contributions of Dr. Ying-Bing Jiang and the support given by the Manufacturing Training and Technology Center at the University of New Mexico.

PY - 2013/10

Y1 - 2013/10

N2 - A technique based on suspended islands is described to measure the in-plane thermal conductivity of thin films and nano-structured materials, and is also employed for measurements of several samples with a single measurement platform. Using systematic steps for measurements, the characterization of the thermal resistances of a sample and its contacts are studied. The calibration of the contacts in this method is independent of the geometry, size, materials, and uniformity of contacts. To verify the technique, two different Si samples with different thicknesses and two samples of the same SiNx wafer are characterized on a single device. One of the Si samples is also characterized by another technique, which verifies the current results. Characterization of the two SiNx samples taken from the same wafer showed less than 1% difference in the measured thermal conductivities, indicating the precision of the method. Additionally, one of the SiNx samples is characterized and then demounted, remounted, and characterized for a second time. The comparison showed the change in the thermal resistance of the contact in multiple measurements could be as small as 0.2 K/μW, if a similar sample is used.

AB - A technique based on suspended islands is described to measure the in-plane thermal conductivity of thin films and nano-structured materials, and is also employed for measurements of several samples with a single measurement platform. Using systematic steps for measurements, the characterization of the thermal resistances of a sample and its contacts are studied. The calibration of the contacts in this method is independent of the geometry, size, materials, and uniformity of contacts. To verify the technique, two different Si samples with different thicknesses and two samples of the same SiNx wafer are characterized on a single device. One of the Si samples is also characterized by another technique, which verifies the current results. Characterization of the two SiNx samples taken from the same wafer showed less than 1% difference in the measured thermal conductivities, indicating the precision of the method. Additionally, one of the SiNx samples is characterized and then demounted, remounted, and characterized for a second time. The comparison showed the change in the thermal resistance of the contact in multiple measurements could be as small as 0.2 K/μW, if a similar sample is used.

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Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance

Abstract

Bibliographical note

ASJC Scopus subject areas

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