MEMS demodulator

So Ra Chung; Sangtak Park; Eihab M. Abdel-Rahman; John Yeow; Mahmoud Khater

doi:10.1115/IMECE2012-87968

MEMS demodulator

So Ra Chung^*
, Sangtak Park
, Eihab M. Abdel-Rahman
, John Yeow
, Mahmoud Khater

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents research focusing on developing and simulating a new way of digital demodulation for the front end Radio frequency (RF) mechanically using MEMS electrostatic actuator by sensing the displacement of a parallel-plates. The operating principle based on the coupling multi-physics of the proposed demodulation device is explained. The analytical modeling and simulation results with experimental data are presented. Recent developments in the Micro Electro Mechanical Systems (MEMS) technology have shown the benefits of reliable mechanical strength that merges with electrical properties. Interest has increased and thus on to improve their performance by applying MEMS technology as to replace existing industrial parts and tools. A typical RF receiver consists of a front end, a band-pass filter, low noise amplifier (LNA), a local oscillator, and a mixer that recovers a baseband signal from a modulated RF signal. In a heterodyne receiver there is more than one intermediate stage. ASK and FSK digital demodulation using electrostatic actuator indicates better feasibility at lower frequency lower than 100 Hz for digital demodulation while indicating wide range of potential baseband range up to 1 kHz.

Original language	English
Title of host publication	Micro- and Nano-Systems Engineering and Packaging
Publisher	American Society of Mechanical Engineers (ASME)
Pages	387-391
Number of pages	5
Edition	PARTS A AND B
ISBN (Print)	9780791845257
DOIs	https://doi.org/10.1115/IMECE2012-87968
State	Published - 2012
Externally published	Yes
Event	ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 - Houston, TX, United States Duration: 9 Nov 2012 → 15 Nov 2012

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Number	PARTS A AND B
Volume	9

Conference

Conference	ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Country/Territory	United States
City	Houston, TX
Period	9/11/12 → 15/11/12

ASJC Scopus subject areas

Mechanical Engineering

Access to Document

10.1115/IMECE2012-87968

Cite this

Chung, S. R., Park, S., Abdel-Rahman, E. M., Yeow, J., & Khater, M. (2012). MEMS demodulator. In Micro- and Nano-Systems Engineering and Packaging (PARTS A AND B ed., pp. 387-391). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 9, No. PARTS A AND B). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2012-87968

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title = "MEMS demodulator",

abstract = "This paper presents research focusing on developing and simulating a new way of digital demodulation for the front end Radio frequency (RF) mechanically using MEMS electrostatic actuator by sensing the displacement of a parallel-plates. The operating principle based on the coupling multi-physics of the proposed demodulation device is explained. The analytical modeling and simulation results with experimental data are presented. Recent developments in the Micro Electro Mechanical Systems (MEMS) technology have shown the benefits of reliable mechanical strength that merges with electrical properties. Interest has increased and thus on to improve their performance by applying MEMS technology as to replace existing industrial parts and tools. A typical RF receiver consists of a front end, a band-pass filter, low noise amplifier (LNA), a local oscillator, and a mixer that recovers a baseband signal from a modulated RF signal. In a heterodyne receiver there is more than one intermediate stage. ASK and FSK digital demodulation using electrostatic actuator indicates better feasibility at lower frequency lower than 100 Hz for digital demodulation while indicating wide range of potential baseband range up to 1 kHz.",

author = "Chung, \{So Ra\} and Sangtak Park and Abdel-Rahman, \{Eihab M.\} and John Yeow and Mahmoud Khater",

year = "2012",

doi = "10.1115/IMECE2012-87968",

language = "English",

isbn = "9780791845257",

series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",

publisher = "American Society of Mechanical Engineers (ASME)",

number = "PARTS A AND B",

pages = "387--391",

booktitle = "Micro- and Nano-Systems Engineering and Packaging",

edition = "PARTS A AND B",

note = "ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 ; Conference date: 09-11-2012 Through 15-11-2012",

}

Chung, SR, Park, S, Abdel-Rahman, EM, Yeow, J & Khater, M 2012, MEMS demodulator. in Micro- and Nano-Systems Engineering and Packaging. PARTS A AND B edn, ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), no. PARTS A AND B, vol. 9, American Society of Mechanical Engineers (ASME), pp. 387-391, ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012, Houston, TX, United States, 9/11/12. https://doi.org/10.1115/IMECE2012-87968

MEMS demodulator. / Chung, So Ra; Park, Sangtak; Abdel-Rahman, Eihab M. et al.
Micro- and Nano-Systems Engineering and Packaging. PARTS A AND B. ed. American Society of Mechanical Engineers (ASME), 2012. p. 387-391 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 9, No. PARTS A AND B).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - MEMS demodulator

AU - Chung, So Ra

AU - Park, Sangtak

AU - Abdel-Rahman, Eihab M.

AU - Yeow, John

AU - Khater, Mahmoud

PY - 2012

Y1 - 2012

N2 - This paper presents research focusing on developing and simulating a new way of digital demodulation for the front end Radio frequency (RF) mechanically using MEMS electrostatic actuator by sensing the displacement of a parallel-plates. The operating principle based on the coupling multi-physics of the proposed demodulation device is explained. The analytical modeling and simulation results with experimental data are presented. Recent developments in the Micro Electro Mechanical Systems (MEMS) technology have shown the benefits of reliable mechanical strength that merges with electrical properties. Interest has increased and thus on to improve their performance by applying MEMS technology as to replace existing industrial parts and tools. A typical RF receiver consists of a front end, a band-pass filter, low noise amplifier (LNA), a local oscillator, and a mixer that recovers a baseband signal from a modulated RF signal. In a heterodyne receiver there is more than one intermediate stage. ASK and FSK digital demodulation using electrostatic actuator indicates better feasibility at lower frequency lower than 100 Hz for digital demodulation while indicating wide range of potential baseband range up to 1 kHz.

AB - This paper presents research focusing on developing and simulating a new way of digital demodulation for the front end Radio frequency (RF) mechanically using MEMS electrostatic actuator by sensing the displacement of a parallel-plates. The operating principle based on the coupling multi-physics of the proposed demodulation device is explained. The analytical modeling and simulation results with experimental data are presented. Recent developments in the Micro Electro Mechanical Systems (MEMS) technology have shown the benefits of reliable mechanical strength that merges with electrical properties. Interest has increased and thus on to improve their performance by applying MEMS technology as to replace existing industrial parts and tools. A typical RF receiver consists of a front end, a band-pass filter, low noise amplifier (LNA), a local oscillator, and a mixer that recovers a baseband signal from a modulated RF signal. In a heterodyne receiver there is more than one intermediate stage. ASK and FSK digital demodulation using electrostatic actuator indicates better feasibility at lower frequency lower than 100 Hz for digital demodulation while indicating wide range of potential baseband range up to 1 kHz.

UR - https://www.scopus.com/pages/publications/84887270038

U2 - 10.1115/IMECE2012-87968

DO - 10.1115/IMECE2012-87968

M3 - Conference contribution

AN - SCOPUS:84887270038

SN - 9780791845257

T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

SP - 387

EP - 391

BT - Micro- and Nano-Systems Engineering and Packaging

PB - American Society of Mechanical Engineers (ASME)

T2 - ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012

Y2 - 9 November 2012 through 15 November 2012

ER -

MEMS demodulator

Abstract

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Conference

ASJC Scopus subject areas

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