Abstract
We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.
| Original language | English |
|---|---|
| Title of host publication | 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems |
| Publisher | American Society of Mechanical Engineers (ASME) |
| ISBN (Electronic) | 9780791858165 |
| DOIs | |
| State | Published - 2017 |
| Externally published | Yes |
Publication series
| Name | Proceedings of the ASME Design Engineering Technical Conference |
|---|---|
| Volume | 4 |
Bibliographical note
Publisher Copyright:© Copyright 2017 ASME.
ASJC Scopus subject areas
- Mechanical Engineering
- Computer Graphics and Computer-Aided Design
- Computer Science Applications
- Modeling and Simulation
