TY - GEN
T1 - Mechanical testing of freestanding nano-films using a novel finite diameter tip MEMS-based testing machine
AU - Leseman, Zayd C.
AU - Sheikh, Zuhaib
AU - Mackin, Thomas J.
AU - Begley, Matthew
PY - 2005
Y1 - 2005
N2 - We present a novel experimental method for measuring the mechanical properties of nano-thickness materials using a freestanding membrane test. Specially fabricated axisymmetric freestanding membranes are centrally deflected using a spherical indenter attached to a custom-designed MEMS load cell. Experiments on freestanding films allows us to determine directly the mechanical properties of the films, over a broad range of length scales, without the confounding effects of a substrate.
AB - We present a novel experimental method for measuring the mechanical properties of nano-thickness materials using a freestanding membrane test. Specially fabricated axisymmetric freestanding membranes are centrally deflected using a spherical indenter attached to a custom-designed MEMS load cell. Experiments on freestanding films allows us to determine directly the mechanical properties of the films, over a broad range of length scales, without the confounding effects of a substrate.
UR - https://www.scopus.com/pages/publications/33645983321
U2 - 10.1115/IMECE2005-80987
DO - 10.1115/IMECE2005-80987
M3 - Conference contribution
AN - SCOPUS:33645983321
SN - 079184224X
SN - 9780791842249
T3 - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
SP - 473
EP - 477
BT - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
T2 - 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Y2 - 5 November 2005 through 11 November 2005
ER -