@inproceedings{6e83910bce6a4b7fa32455f0f0f3f2ef,
title = "Mechanical testing of freestanding nano-films using a novel finite diameter tip mems-based testing machine",
abstract = "We present a new experimental method for measuring the mechanical properties of nanoscale-thick materials using the free-standing membrane test. Freestanding circular membranes are centrally deflected using a spherical indenter attached to a microfabricated fixed-fixed beam device. Experiments of this type allow us to extract mechanical properties of the thin films without the complicating effects of the substrate, enabling accurate study of length scale effects. These experiments differ from previous work by testing freestanding films and by including the finite contact size of the indenter tip.",
author = "Leseman, {Zayd C.} and Zuhaib Sheikh and Mackin, {Thomas J.} and Matthew Begley",
year = "2005",
doi = "10.1115/nano2005-87050",
language = "English",
isbn = "0791842088",
series = "2005 Proceedings of the 4th ASME Conference on Integrated Nanosystems: Design, Synthesis, and Applications",
publisher = "American Society of Mechanical Engineers",
pages = "9--10",
booktitle = "Proceedings of the 4th ASME Integrated Nanosystems Conference",
note = "4th ASME Integrated Nanosystems Conference: Design, Synthesis, and Applications ; Conference date: 14-09-2005 Through 16-09-2005",
}