TY - GEN
T1 - Measurement of in-plane thermal conductivity using suspended SiN x islands
AU - Alaie, Seyedhamidreza
AU - Goettler, Drew F.
AU - Abbas, Khawar
AU - El-Kady, Ihab
AU - Leseman, Zayd C.
PY - 2012
Y1 - 2012
N2 - In order to measure in-plane thermal conductivity, electrical resistivity, and Seebeck Coefficient of Phononic Crystals (PnCs) a micro device is designed and fabricated to host different nano-scale samples. The device is comprised of two SiNx suspended membranes with patterned by Pt on top and covered by AlN. The Pt deposited on these two membranes or islands are dual-purpose temperature sensors and heaters. One side of a sample can be attached to each of the two islands. In this way 1-D heat flow can be established in the material to be tested. Covering the islands with AlN enhances the uniformity of temperature on each sensor. Moreover, AlN is an excellent electrical insulator, and it protects the platinum sensors from different sources of doping such as gallium ions used for patterning, depositing, mounting, or demounting different samples on the islands. This ensures the thermo-electric properties of the sensors on the platform do not change after each measurement. Using this design, it is demonstrated that one platform can be used for measurement of a silicon slab and then a separate measurement of a 1-D PnC fabricated from the same sample. The 1-D PnC had a Si-W structure that was fabricated using a Focused Ion Beam (FIB) and a Gas Injection System (GIS) capable of depositing W.
AB - In order to measure in-plane thermal conductivity, electrical resistivity, and Seebeck Coefficient of Phononic Crystals (PnCs) a micro device is designed and fabricated to host different nano-scale samples. The device is comprised of two SiNx suspended membranes with patterned by Pt on top and covered by AlN. The Pt deposited on these two membranes or islands are dual-purpose temperature sensors and heaters. One side of a sample can be attached to each of the two islands. In this way 1-D heat flow can be established in the material to be tested. Covering the islands with AlN enhances the uniformity of temperature on each sensor. Moreover, AlN is an excellent electrical insulator, and it protects the platinum sensors from different sources of doping such as gallium ions used for patterning, depositing, mounting, or demounting different samples on the islands. This ensures the thermo-electric properties of the sensors on the platform do not change after each measurement. Using this design, it is demonstrated that one platform can be used for measurement of a silicon slab and then a separate measurement of a 1-D PnC fabricated from the same sample. The 1-D PnC had a Si-W structure that was fabricated using a Focused Ion Beam (FIB) and a Gas Injection System (GIS) capable of depositing W.
UR - https://www.scopus.com/pages/publications/84887281652
U2 - 10.1115/IMECE2012-88786
DO - 10.1115/IMECE2012-88786
M3 - Conference contribution
AN - SCOPUS:84887281652
SN - 9780791845257
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 611
EP - 615
BT - Micro- and Nano-Systems Engineering and Packaging
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Y2 - 9 November 2012 through 15 November 2012
ER -