Lubrication of sliding silicon MEMS devices using ferrofluids-based magnetic matrix texture

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@article{d76c032457ba4ef3820e24d0c29439a8,

title = "Lubrication of sliding silicon MEMS devices using ferrofluids-based magnetic matrix texture",

author = "Liu Tonggang and Muhammad Chhattal and You Kun and Lin Zili",

year = "2021",

month = jan,

doi = "10.1049/mna2.12007",

language = "English",

volume = "16",

pages = "44--50",

journal = "Micro and Nano Letters",

issn = "1750-0443",

publisher = "John Wiley and Sons Inc.",

number = "1",

}

TY - JOUR

T1 - Lubrication of sliding silicon MEMS devices using ferrofluids-based magnetic matrix texture

AU - Tonggang, Liu

AU - Chhattal, Muhammad

AU - Kun, You

AU - Zili, Lin

PY - 2021/1

Y1 - 2021/1

UR - https://www.scopus.com/pages/publications/85108913195

U2 - 10.1049/mna2.12007

DO - 10.1049/mna2.12007

M3 - Letter

AN - SCOPUS:85108913195

SN - 1750-0443

VL - 16

SP - 44

EP - 50

JO - Micro and Nano Letters

JF - Micro and Nano Letters

IS - 1

ER -