TY - GEN
T1 - Low voltage electrostatic actuation for MEMS actuator using frequency modulation
AU - Park, Sangtak
AU - Khater, Mahmoud
AU - Abdel-Rahman, Eihab
PY - 2013
Y1 - 2013
N2 - In this paper, we derive and present an analytical model of the parallel-plate electrostatic actuator coupled with the resonant drive circuit when it is driven by a frequency-modulated input signal. Using this analytical model, we determine the stability of the fixed points of the actuator without linearization process. Furthermore, we study the effect of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range and stability of the electrostatic actuator.
AB - In this paper, we derive and present an analytical model of the parallel-plate electrostatic actuator coupled with the resonant drive circuit when it is driven by a frequency-modulated input signal. Using this analytical model, we determine the stability of the fixed points of the actuator without linearization process. Furthermore, we study the effect of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range and stability of the electrostatic actuator.
UR - https://www.scopus.com/pages/publications/84896983251
U2 - 10.1115/DETC2013-13376
DO - 10.1115/DETC2013-13376
M3 - Conference contribution
AN - SCOPUS:84896983251
SN - 9780791855843
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems
PB - American Society of Mechanical Engineers
ER -