Low cost and rapid precision measurement at mesoscale using Sub-Pixel edge detection technique

This low cost inspection vision system is based on edge detection technique and is exploited for feature extraction and measurement, e.g. inspection in metrology. For better performance in accuracy and processing time, the combination of the pixel accuracy edge detector and the subpixel accuracy edge detector was implemented along with camera calibration. This procedure revealed smooth edge boundaries closer to true contour of the specimen compared to Canny edge detector. An example of measurement is shown.