Large signal performance of micromachined silicon inductive microphones

Muhammad Taher Abuelma'atti

doi:10.1016/j.apacoust.2006.06.006

Large signal performance of micromachined silicon inductive microphones

Muhammad Taher Abuelma'atti^*

^*Corresponding author for this work

King Fahd University of Petroleum & Minerals

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

Original language	English
Pages (from-to)	1286-1296
Number of pages	11
Journal	Applied Acoustics
Volume	68
Issue number	10
DOIs	https://doi.org/10.1016/j.apacoust.2006.06.006
State	Published - Oct 2007

Keywords

Inductive microphones
Intermodulation
Sensors

ASJC Scopus subject areas

Acoustics and Ultrasonics

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10.1016/j.apacoust.2006.06.006

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title = "Large signal performance of micromachined silicon inductive microphones",

abstract = "A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.",

keywords = "Inductive microphones, Intermodulation, Sensors",

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AB - A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

KW - Inductive microphones

KW - Intermodulation

KW - Sensors

UR - https://www.scopus.com/pages/publications/34548039940

U2 - 10.1016/j.apacoust.2006.06.006

DO - 10.1016/j.apacoust.2006.06.006

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Large signal performance of micromachined silicon inductive microphones

Abstract

Keywords

ASJC Scopus subject areas

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