TY - GEN
T1 - Large signal performance of micromachined silicon inductive microphones
AU - Abuelma'atti, Muhammad Taher
PY - 2005
Y1 - 2005
N2 - A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.
AB - A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.
UR - http://www.scopus.com/inward/record.url?scp=33847309117&partnerID=8YFLogxK
U2 - 10.1109/ICIT.2005.1600677
DO - 10.1109/ICIT.2005.1600677
M3 - Conference contribution
AN - SCOPUS:33847309117
SN - 0780394844
SN - 9780780394841
T3 - Proceedings of the IEEE International Conference on Industrial Technology
SP - 432
EP - 437
BT - 2005 IEEE International Conference on Industrial Technology, ICIT 2005
ER -