Abstract
Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 °C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6-21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 °C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 2598-2609 |
| Number of pages | 12 |
| Journal | Sensors |
| Volume | 12 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2012 |
Keywords
- AFM
- CO sensor
- CeO
- Semiconductor gas sensor
- SnO
- Thin film
- XPS
ASJC Scopus subject areas
- Analytical Chemistry
- Biochemistry
- Atomic and Molecular Physics, and Optics
- Instrumentation
- Electrical and Electronic Engineering