Influence of vacuum annealing on the physical properties of ZnO/Al/ZnO multilayer coatings

M. A. Al-Maghrabi; M. F. Al-Kuhaili; S. M.A. Durrani; I. A. Bakhtiari

doi:10.1116/1.3072512

Influence of vacuum annealing on the physical properties of ZnO/Al/ZnO multilayer coatings

M. A. Al-Maghrabi, M. F. Al-Kuhaili, S. M.A. Durrani, I. A. Bakhtiari

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

Multilayer ZnO/Al/ZnO coatings were deposited by thermal evaporation on substrates heated to 300 °C. Subsequently, the coatings were annealed in vacuum in the temperature range of 300-600 °C. The structural properties of the films were investigated using x-ray diffraction and atomic force microscopy. The chemical properties were determined from x-ray photoelectron spectroscopy. The electrical and optical properties of the coatings were studied in order to evaluate their performance as transparent conducting coatings. The best performance was obtained with films annealed at 500 °C, for which the average visible transmittance was about 60% and the resistivity was 6.1× 10-3 cm.

Original language	English
Pages (from-to)	276-281
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	27
Issue number	2
DOIs	https://doi.org/10.1116/1.3072512
State	Published - 2009

Bibliographical note

Funding Information:
This work was supported by the Department of Physics of the King Fahd University of Petroleum and Minerals.

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Influence of vacuum annealing on the physical properties of ZnO/Al/ZnO multilayer coatings",

abstract = "Multilayer ZnO/Al/ZnO coatings were deposited by thermal evaporation on substrates heated to 300 °C. Subsequently, the coatings were annealed in vacuum in the temperature range of 300-600 °C. The structural properties of the films were investigated using x-ray diffraction and atomic force microscopy. The chemical properties were determined from x-ray photoelectron spectroscopy. The electrical and optical properties of the coatings were studied in order to evaluate their performance as transparent conducting coatings. The best performance was obtained with films annealed at 500 °C, for which the average visible transmittance was about 60\% and the resistivity was 6.1× 10-3 cm.",

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note = "Funding Information: This work was supported by the Department of Physics of the King Fahd University of Petroleum and Minerals.",

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T1 - Influence of vacuum annealing on the physical properties of ZnO/Al/ZnO multilayer coatings

AU - Al-Maghrabi, M. A.

AU - Al-Kuhaili, M. F.

AU - Durrani, S. M.A.

AU - Bakhtiari, I. A.

N1 - Funding Information: This work was supported by the Department of Physics of the King Fahd University of Petroleum and Minerals.

PY - 2009

Y1 - 2009

N2 - Multilayer ZnO/Al/ZnO coatings were deposited by thermal evaporation on substrates heated to 300 °C. Subsequently, the coatings were annealed in vacuum in the temperature range of 300-600 °C. The structural properties of the films were investigated using x-ray diffraction and atomic force microscopy. The chemical properties were determined from x-ray photoelectron spectroscopy. The electrical and optical properties of the coatings were studied in order to evaluate their performance as transparent conducting coatings. The best performance was obtained with films annealed at 500 °C, for which the average visible transmittance was about 60% and the resistivity was 6.1× 10-3 cm.

AB - Multilayer ZnO/Al/ZnO coatings were deposited by thermal evaporation on substrates heated to 300 °C. Subsequently, the coatings were annealed in vacuum in the temperature range of 300-600 °C. The structural properties of the films were investigated using x-ray diffraction and atomic force microscopy. The chemical properties were determined from x-ray photoelectron spectroscopy. The electrical and optical properties of the coatings were studied in order to evaluate their performance as transparent conducting coatings. The best performance was obtained with films annealed at 500 °C, for which the average visible transmittance was about 60% and the resistivity was 6.1× 10-3 cm.

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SN - 0734-2101

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 2

ER -

Influence of vacuum annealing on the physical properties of ZnO/Al/ZnO multilayer coatings

Abstract

Bibliographical note

ASJC Scopus subject areas

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