Abstract
Zinc oxide thin films were deposited, by radio frequency magnetron sputtering, on heated and unheated substrates. The oxygen flow rate was varied during deposition, and its effects on the structural and chemical properties of the films were investigated. The films had oriented c-axis growth with nano-crystallite size. Their surfaces manifested columnar microstructure, with a surface roughness that was suppressed by the introduction of oxygen. Chemical analysis showed that deposition under an oxygen atmosphere resulted in substantial reduction of oxygen vacancies, with a corresponding incorporation of chemisorbed species.
| Original language | English |
|---|---|
| Pages (from-to) | 1353-1357 |
| Number of pages | 5 |
| Journal | Surface and Interface Analysis |
| Volume | 45 |
| Issue number | 9 |
| DOIs | |
| State | Published - Sep 2013 |
Keywords
- Chemical properties
- Oxygen flow rate
- RF sputtering
- Structural properties
- Zinc oxide
ASJC Scopus subject areas
- General Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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