TY - GEN
T1 - Infiltration-processed, functionally graded materials for microceramic componenets
AU - Hassanin, H.
AU - Jiang, K.
PY - 2010
Y1 - 2010
N2 - A three-dimensional micro ceramic functionally graded material (FGM) has been fabricated by an infiltration process. The proposed technique offers an effective way to tailor the composition and microstructure of ceramic micro components. The process involves soft lithography, colloidal powder processing and the infiltration of yttria stabilized zirconia with a pre-ceramic polymer solution. Analyses by SEM, BSE and EDS have revealed the existence of concentration gradients, the Si and C content decreasing with increasing of the sample depth. The resultant micro part has a homogeneous core encased with a graded and layer of YSZ / SiC.
AB - A three-dimensional micro ceramic functionally graded material (FGM) has been fabricated by an infiltration process. The proposed technique offers an effective way to tailor the composition and microstructure of ceramic micro components. The process involves soft lithography, colloidal powder processing and the infiltration of yttria stabilized zirconia with a pre-ceramic polymer solution. Analyses by SEM, BSE and EDS have revealed the existence of concentration gradients, the Si and C content decreasing with increasing of the sample depth. The resultant micro part has a homogeneous core encased with a graded and layer of YSZ / SiC.
UR - https://www.scopus.com/pages/publications/77952755988
U2 - 10.1109/MEMSYS.2010.5442488
DO - 10.1109/MEMSYS.2010.5442488
M3 - Conference contribution
AN - SCOPUS:77952755988
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 368
EP - 371
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -