Abstract
Currently micro-electromechanical systems (MEMS) technology is creating micro-mirrors for applications such as scanning and adaptive optics. A 0.5 μm thin, reflective polyester sheet is used to create a 950 μm diameter flexible mirror that is capable of changing its concavity. A system that consists of electrical circuits and LabVIEW interfaces were used to control the mirror. This paper presents a micro-mirror that is fabricated from a 0.5 μm thin, reflective polyester sheet clamped with aluminum disks. An electromagnetic plunge actuator controls the pressure beneath the mirror to change the curvature of the mirror. The focal point of the micro-mirror ranges from approximately infinity to 3.5 mm. This range is much wider than the ranges that are typical of MEMS mirrors. The curvature of the micro-mirror can be altered at a maximum observable frequency of about 15 Hz. The micro-mirror center depth movement is at increments of approximately 2 μm and the focal length increment of change is approximately 5 mm. The mirror is capable of dynamically focusing on objects at a distance of 6 cm to longer than 7 m away from the mirror.
| Original language | English |
|---|---|
| Pages (from-to) | 61-70 |
| Number of pages | 10 |
| Journal | Mechatronics |
| Volume | 18 |
| Issue number | 2 |
| DOIs | |
| State | Published - Mar 2008 |
| Externally published | Yes |
Keywords
- Adaptive optics
- Electro-mechanical systems
- Electromagnetic actuation and image focusing
- Hydraulic control
- Micro devices
- Micro-mirror
- Piezoelectric
- Polyester reflective film
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Computer Science Applications
- Electrical and Electronic Engineering
Fingerprint
Dive into the research topics of 'Hydraulic controlled polyester-based micro adaptive mirror with adjustable focal length'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver