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Growth of carbon nanotubes on cobalt disilicide precipitates by chemical vapor deposition

  • J. M. Mao*
  • , L. F. Sun
  • , L. X. Qian
  • , Z. W. Pan
  • , B. H. Chang
  • , W. Y. Zhou
  • , G. Wang
  • , S. S. Xie
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

50 Scopus citations

Abstract

We have successfully grown carbon nanotubes on cobalt-implanted silicon with various doses. The morphology of such tubes has been examined by scanning electron microscopy, transmission electron microscopy, and Raman scattering. On contrary to the commonly used transition-metal nanoparticle catalysts, nanometer-sized CoSi2 precipitates produced in the as-implanted substrates are believed to act as nucleation centers for the formation of carbon nanotubes.

Original languageEnglish
Pages (from-to)3297-3299
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number25
DOIs
StatePublished - 1998
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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