Abstract
The effect of Ga/N flux ratio on lattice polarity, surface morphology and manganese incorporation during the radio frequency molecular beam epitaxy of (Ga,Mn)N was discussed. Three regimes of growth, N-rich, metal-rich and Ga-rich were identified and it was found that manganese incorporation occurs only for N-rich and metal-rich conditions. The surface morphology improved significantly even when the growth was only slightly metal-rich.
| Original language | English |
|---|---|
| Pages (from-to) | 5274-5281 |
| Number of pages | 8 |
| Journal | Journal of Applied Physics |
| Volume | 93 |
| Issue number | 9 |
| DOIs | |
| State | Published - 1 May 2003 |
| Externally published | Yes |
ASJC Scopus subject areas
- General Physics and Astronomy