Ga/N flux ratio influence on Mn incorporation, surface morphology, and lattice polarity during radio frequency molecular beam epitaxy of (Ga,Mn)N

Muhammad B. Haider, Costel Constantin, Hamad Al-Brithen, Haiqiang Yang, Eugen Trifan, David Ingram, Arthur R. Smith*, C. V. Kelly, Y. Ijiri

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

The effect of Ga/N flux ratio on lattice polarity, surface morphology and manganese incorporation during the radio frequency molecular beam epitaxy of (Ga,Mn)N was discussed. Three regimes of growth, N-rich, metal-rich and Ga-rich were identified and it was found that manganese incorporation occurs only for N-rich and metal-rich conditions. The surface morphology improved significantly even when the growth was only slightly metal-rich.

Original languageEnglish
Pages (from-to)5274-5281
Number of pages8
JournalJournal of Applied Physics
Volume93
Issue number9
DOIs
StatePublished - 1 May 2003
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy

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